7,081,657 - MEMS and method of manufacturing MEMS

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Abstract 

MEMS devices have found their way in numerous useful applcations ranging from displays to sensors that activitate airbags. However, MEMS techno,logies conitneu to be costly due to the fragmented nature of different processes and tools that are requeired for diffetn applcation. Reveo's newly issued patent 7,081,657 , solves the problem of fragmentation using the MFT technology described in the patent. This potenially enables all MEMS devices to be made using a standard process and standard tools, thereby reducing the cost.